Product Detail
Product Tags
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Model | WN104TA25H | Travel Range | 25 mm | Resolution | 0.125 μm | Repeatability | < 1 µm | Straightness | < 2 µm | Driving Parallelism | < 5 µm | Pitching | 10’’ (50µrad) | Yawing | 10’’ (50µrad) | Maximum Speed | 5mm/sec | Load Capacity | 10kg | Weight | 1.5kg | Key Features | - Non-contact direct-drive system ensures ultraprecision motion with high dynamics and reliability
- Extra-large, high-efficiency linear motor minimizes heat generation
- Ironless moving coil has no cogging for ultra smooth velocity control
- Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration
- High precision glass scale encoder provides accurate position feedback with 50 nm repeatability
- Sub-nm resolution with low interpolation error for outstanding speed stability and motion sensitivity
- No moving cables inside the stage, reduced particle generation and improved reliability
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